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electron beam
Tool / ProductA method used initially by Akasaki and Amano to activate p-type properties in magnesium-doped gallium nitride, though it proved too slow for commercial production.
Mentioned in 1 video
A method used initially by Akasaki and Amano to activate p-type properties in magnesium-doped gallium nitride, though it proved too slow for commercial production.
Mentioned in 1 video